A decapsulation apparatus 100 has a laser 8 that removes plastic
encapsulant from a device 24. Chamber 20 is sealed. Exhaust port 9
removes debris and fumes. The device 24 is positioned and scanned using
an X, Y table 2. A hinged end 4 rotates the device to an acute angle of
incidence with respect to a laser 8. Endpoint detector 10 senses the
exposed integrated circuit and moves or shuts down the laser 8.