The growth of carbon nanotubes such as single-walled carbon nanotubes (SWNTs) is achieved using a catalyst and carbon feedstock gas, with the catalyst being delivered using an approach for relatively clean delivery and placement thereof. In one example embodiment, nanoparticles are deposited from solution onto a substrate, and the substrate is subsequently heated to form catalyst material from the nanoparticles. A carbon nanotube is then grown from the catalyst material, using the catalyst material to catalyze a reaction that is used to grow the carbon nanotube. In one implementation, hydroxylamine is used in the deposition of nanoparticles of a catalyst precursor material from aqueous iron-containing solutions onto an SiO.sub.2 substrate. The nanoparticles are heated and used to form catalyst material on the SiO.sub.2 substrate, which is used in the subsequent growth of carbon nanotubes via the introduction of carbon-containing gas to the nanoparticles.