A method and system of controlling a process from run-to-run for semiconductor manufacturing. The method of control utilizes a process model to establish a relationship between process control input data and process control output data. The method of control involves minimizing the difference between target process control output data and process control output data predicted by applying the process model to the new process control input data.

 
Web www.patentalert.com

< System, method and computer program product for subsurface contamination detection and analysis

< Internet crawl seeding

> Interactive graphical environment for drug model generation

> Method, apparatus and computer program product for determination of noise in mixed signal systems

~ 00297