N-V centers in diamond are created in a controlled manner. In one
embodiment, a single crystal diamond is formed using a CVD process, and
then annealed to remove N-V centers. A thin layer of single crystal
diamond is then formed with a controlled number of N-V centers. The N-V
centers form Qubits for use in electronic circuits. Masked and controlled
ion implants, coupled with annealing are used in CVD formed diamond to
create structures for both optical applications and nanoelectromechanical
device formation. Waveguides may be formed optically coupled to the N-V
centers and further coupled to sources and detectors of light to interact
with the N-V centers.