The invention includes polymers that contain a heterocyclic ring, preferably an oxygen- or sulfur-containing ring. The heterocyclic ring is preferably fused to the polymer backbone. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.

 
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< Thermoplastic norbornene resin based optical film

< Thermoplastic norbornene resin based optical film

> Metal 8-hydroxyquinoline-functionalized polymers and related materials and methods of making and using the same

> Fluorine-containing polymerizable monomers and polymers, anti-reflection film materials and resist compositions using same

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