A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.

 
Web www.patentalert.com

< Techniques for determining communication state using accelerometer data

< Robot imaging device

> Morpholoidally deforming toy

> Autonomous surface cleaning robot for dry cleaning

~ 00285