The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.

 
Web www.patentalert.com

< Transbronchial reflectance oximetric measurement of mixed venous oxygen saturation, and device therefor

< Methods of populating data structures for use in evolutionary simulations

> Method for determining layer thickness ranges

> Method for assessing myocardial angiogenesis
~ 00279