An apparatus and method for in situ spectral measurement is disclosed. The apparatus uses a low-resolution grating to disperse light and thereby image a spectrum thereof. The imaged spectrum is converted into a digital electrical signal and is processed in order to enhance the spectral information. The resulting spectral information is analogous to that captured using a higher resolution spectral imager with optical processing of the spectral data.

 
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< Variable binning CCD for spectroscopy

< Fast high-accuracy multi-dimensional pattern inspection

> Image processing method

> Interferometric confocal microscopy incorporating a pinhole array beam-splitter

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