A pulse stretcher includes a first prism and a second prism positioned opposite each other. A first coupling prism is optically coupled to the first prism with a partially reflective interface that directs a beam towards the second prism in a helical path. The first prism and the first coupling prism form a beamsplitter. A recirculating prism (or a reflective element) reflects the beam from the first prism into the second prism. Mirrors are positioned around the first and second prisms to permit recirculation of the beam through the first and second prisms. The beam recirculates through the first and second prisms using two or more helical paths. The pulse stretcher can be incorporated into a lithographic system.

 
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> Diffractive optical position detector in an atomic force microscope having a moveable cantilever

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