A high-speed image acquisition system includes a source of light; a sensor for
acquiring a plurality of images of the target; a system for determining relative
movement between the source and the target; and an image processor for processing
the acquired images to generate inspection information relative to the target.
The system has an extended dynamic range provided by controlling illumination such
that the plurality of images is acquired at two or more different illumination
levels. In some embodiments, the high-speed image acquisition system is used to
perform three dimensional phase profilometry inspection.