A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment. The method also includes the step of thermally decomposing the resulting mixed gas in a non-oxidizing atmosphere.

 
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< Gas combustion treatment method and apparatus therefor

< Process for reducing nitrogen oxides

> Synthetic mesoporous material with radially assembled nanotubes

> Arylcarbonylated vapor-grown carbon nanofibers

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