The present invention discloses a robotic manipulator, comprising at least one joint, each joint having a drive axis and at least one microelectromechanical system (MEMS) inertial sensor aligned with at least one drive axis providing sensing of a relative position of the drive axis. The robotic manipulator can include an inertial measurement unit (IMU) coupled to the robotic manipulator for determining the end effector position and orientation. A controller can be used, receiving a signal from at least one MEMS inertial sensor and controlling at least one joint drive axis in response to the signal to change the relative position of the joint drive axis. Rate information from MEMS sensors can be integrated to determine the position of their respective drive axes.