A method and system for testing one or more large substrates are provided.
In one or more embodiments, the system includes a testing chamber having
a substrate table disposed therein. The substrate table is adapted to
move a substrate within the testing chamber in various directions. More
particularly, the substrate table includes a first stage movable in a
first direction, and a second stage movable in a second direction,
wherein each of the stages moves in an X-direction, Y-direction or both X
and Y directions. The system further includes a load lock chamber at
least partially disposed below the testing chamber, and a transfer
chamber coupled to the load lock chamber and the testing chamber. In one
or more embodiments, the transfer chamber includes a robot disposed
therein which is adapted to transfer substrates between the load lock
chamber and the testing chamber.