A method of wave propagation from 100-10000 GHz. The currently disclosed method
and apparatus adapts micro-opto-electro-mechanical systems (MOEMS) technologies
and processes to construct Kinoform optical components from microwave to terahertz
range. The method uses induced coupled plasma (ICP) and gray scale processes for
upper terahertz band; LIGA-based high aspect ratio (HAR) and gray scale processes
are for the mid band; and computer numerical control (CNC) for lower band. In all
cases, the thickness of any processed components is about the respective wavelength
and system efficiency is about 95%. A Kinoform lens element is designed at 5000
GHz. However, the method is applicable for the entire terahertz band.