A polishing apparatus includes an arrangement of a plurality of units to deal with various operations and a robot having at least one arm. The plurality of units are disposed around the robot and include a loading unit for receiving thereon a, e.g. dry, workpiece to be polished, a polishing system including at least one polishing unit for polishing the workpiece, a washing system and a drying system at least including one washing unit for washing and drying the polished workpiece, and an unloading unit for receiving thereon a resultant clean and dry polished workpiece.

 
Web www.patentalert.com

< Self-running robot

< Modular tool unit for processing microelectronic workpieces

> Guidance system for a robot

> Programming device for returning robot to waiting position

~ 00230