The present invention relates to a method in quality control of a spectrophotometer, comprising the steps of determining with the spectrophotomer a spectrum Am() of a fluid QC sample containing a dye, and determining a wavelength shift from C(), Am(), in which C() is a predetermined coefficient vector previously stored in a memory of the spectrophotometer.

 
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> Monochromator system and applications thereof

> Scatterometry to simultaneously measure critical dimensions and film properties

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