A method of forming (and an apparatus for forming) a metal oxide layer on a substrate, particularly a semiconductor substrate or substrate assembly, using a vapor deposition process and one or more precursor compounds that include organo-amine ligands and one or more precursor compounds that include organo-oxide ligands.

 
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< Miniature microscope objective for an array microscope

< Optical sensor and optical process for the characterization of a chemical and/or bio-chemical substance

> Semiconductor storage device and method of manufacturing the same

> Low dielectric constant film material, film and semiconductor device using such material
~ 00217