Methods for dicing wafer stacks are provided. Preferably, the method includes the steps of: (1) providing a wafer stack having a first wafer and a second wafer; (2) exposing a portion of the first wafer by removing a portion of the second wafer; and (3) dicing the exposed portion of the first wafer such that a first die assembly is at least partially separated from the wafer stack. Wafer stacks and die assemblies also are provided.

 
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< Semiconductor device and method for producing the same by dicing

< Method for dicing semiconductor chips and corresponding semiconductor chip system

> Use of a U-groove as an alternative to using a V-groove for protection against dicing induced damage in silicon

> Method for dicing semiconductor wafer into chips

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