A plasma probe that includes a substrate having substantially the same properties
as those of a substrate to be processed, a bottom electrode layer located over
the substrate and electrically isolated therefrom, a dielectric layer positioned
over the bottom electrode layer including apertures through which one or more electrodes
of the bottom electrode layer are exposed, and at least one upper electrode layer
that is electrically isolated from the bottom electrode layer by way of the dielectric
layer. Electrodes of the bottom and upper electrode layers communicate with meters
which may provide real-time data representative of one or more properties of a
region of a plasma to which the electrodes are exposed. The plasma probe may be
fabricated by forming the bottom electrode layer over the substrate and separately
forming one or more upper electrode layers over a sacrificial substrate. These
structures are assembled with the dielectric layer therebetween.