A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.

 
Web www.patentalert.com

< Liquid crystal display device

< System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism

> Apparatus and method for inspection of photolithographic mask

> Cyclic error compensation in interferometry systems

~ 00210