A plurality of alignment marks disposed on a substrate is photoelectrically
detected, and detected photoelectric signals are added to phase-shifted
signals produced by shifting the phase of the detection signals to produce
a sum signal. The phase is shifted by quantities corresponding to the
intervals between the marks to superpose the peaks of the detection
signals on the peaks of the phase-shifted signals. A correlation is
determined between the sum signal and a reference signal corresponding to
the narrow width of detection. A position where the coefficient of
correlation is a maximum value is taken as the mark position. Thus, it is
possible to use a reference signal having less peaks and a narrow width in
the detecting direction, so that the number of times of product-sum
calculation for calculation of the correlation can be small as compared
with that when a reference signal having as many peaks as the marks and a
same periodicity. The mark can be detected in a shorter time to raise the
throughput of a mass production of semiconductor devices which are
produced by exposing a substrate.