There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.