A process for forming metal oxides, including mixed metal oxides, in a dilute
vapor
phase at a temperature below approximately 350 degrees Fahrenheit. The resulting
novel oxides can be formed as dense films or coatings with very high strain-to-crack
values, or as nanoparticles, depending primarily upon the concentration of the
reactants. The novel oxides are formed by the reaction in the vapor phase of reactive
metal molecules with atomic oxygen. The reactions are instantaneous at room temperature,
which permits this process to be applied to the formation of metal oxides on temperature
sensitive substrates. The atomic oxygen and highly reactive metal containing molecules
are generated by the application of an effective amount of ultraviolet radiation.
