A non-contacting capacitive diagnostic device includes a pulsed light source
for
producing an electric field in a semiconductor or photovoltaic device or material
to be evaluated and a circuit responsive to the electric field. The circuit is
not in physical contact with the device or material being evaluated and produces
an electrical signal characteristic of the electric field produced in the device
or material. The diagnostic device permits quality control and evaluation of semiconductor
or photovoltaic device properties in continuous manufacturing processes.
