An organic light-emitting diode is described in which the anode comprises midfrequency
magnetron sputtered aluminum-doped zinc oxide to increase the device stability
and to decrease the material cost. Due the novel deposition technique, ZnO:Al film
with ITO-like electrical conductivity can be deposited and improved device performance,
especially the long-term stability can be obtained which are attributed to the
modification of the ZnO:Al conductivity and surface chemistry.
