Voltage contrast-based apparatuses, methods and systems for detection of
continuity are described for use in evaluation of conducting components of a microcircuit
such as a silicon wafer-based semiconductor chip. Two beams are directed to two
separate conducting, electrically floating components on the sample, and are timed
and delivered to be alternating pulses. One lower energy beam elicits its target
to emit secondary electrons that are detected by an electron detector to produce
an image. A second high-energy beam creates a virtual ground at its target. Voltage
contrast images indicate whether there is continuity between the two conducting components.
