An apparatus and process for enhancing the ignition of a gas to form a plasma
in a plasma tool. The apparatus and process includes the use of a plasma tube to
locally enhance the applied electric field so that plasma can be initiated at higher
pressures, at lower electric fields, and/or in otherwise difficult gases to ignite.
The plasma tube includes at least one conductive fiber secured to the tube. A process
for enhancing the local electric field includes coupling the plasma tube to an
energy source such as microwave energy, radiofrequency energy, or a combination
comprising at least one of the foregoing energy sources.
