Crack propagation stops for dicing of planar lightwave circuit devices

   
   

One aspect of the present invention relates to a method of dicing a substrate containing a plurality of non-rectangular shaped optical integrated circuits, involving forming stop cracks in the wafer, each stop crack adjacent and substantially parallel one of the non-rectangular shaped optical integrated circuits, and cutting the substrate in a curvilinear manner substantially parallel to a stop crack. Another aspect of the present invention relates to an optical structure containing a substrate; a plurality of non-rectangular shaped optical integrated circuits on the substrate, each non-rectangular shaped optical integrated circuit having an active region; and at least one stop crack positioned adjacent each non-rectangular shaped optical integrated circuit.

 
Web www.patentalert.com

< Dicing process for GAAS/INP and other semiconductor materials

< Method and apparatus for picking up a semiconductor chip, method and apparatus for removing a semiconductor chip from a dicing tape, and a method of forming a perforated dicing tape

> Method and system for dicing wafers, and semiconductor structures incorporating the products thereof

> Method of fabricating semiconductor devices on a semiconductor wafer using a carrier plate during grinding and dicing steps

~ 00181