A laser plasma X-ray generating apparatus that can promptly repair a cryo-target
layer on a drum surface held at a very low temperature using a liquid nitrogen
is provided, and a drum 122 is fixed to a lower end of a shaft 121,
and the drum 122 is arranged so as to be able to be moved in its rotating
direction and its axle direction at an inside of the cryo-forming cover 106.
And a liquid nitrogen supplying pipe 131 is inserted into the shaft 121,
and a conduit 144 for supplying the target gas is connected to the cryo-forming
cover 106. Further, a jacket 171 is arranged at the periphery of
the cryo-forming cover 106 and a pipe 185 is arranged at the periphery
of the conduit 144, resulting in forming a heat exchanger. A vapor gas of
liquid nitrogen is drawn from a gap S between the shaft 121 and the pipe
for supplying the liquid nitrogen 131, introducing the vapor gas between
the conduit 144 and the pipe 185, further introducing the vapor gas
into an inside of the jacket 171, resulting in cooling the target gas, so
that efficiency of attachment of the target material is improved.
