This ink jet recording head manufacturing method comprises (A) a process
for forming a peeling layer 11 wherein peeling is induced by light
irradiation, on a base plate 10 exhibiting light-transmissivity, (B) a
process for forming a common electrode film 3 on the peeling layer 11, (C)
a process for forming a plurality of piezoelectric elements 4, (D) a
process for forming a reservoir piece 5 comprising a lid structure that
accommodates in its interior one or more piezoelectric elements 4, which
interior forms an ink reservoir 51, (E) a process for irradiating the
peeling layer 11 with prescribed light from the base plate 10 side
thereof, thereby producing peeling in the peeling layer 11, and peeling
the base plate 10 away, and (F) a process for bonding a pressure chamber
plate 2, whereon are provided a plurality of pressure chambers 21, to the
common electrode film 3 separated from the base plate, so that the
pressure chambers 21 are sealed.
Heads compatible with high resolution can thus be manufactured because thin
pressure chamber plates can be fabricated in a separate process from the
piezoelectric element formation process and then, last of all, bonded in
place.
