A sterilization system and method applies low frequency power to a plasma
within a vacuum chamber to remove gas or vapor species from an article.
The sterilization system includes a switching module adapted to pulsate
the low frequency power applied to the plasma and a low frequency power
feedback control system for controllably adjusting the low frequency power
applied to the plasma. A power monitor is adapted to produce a first
signal indicative of the low frequency power applied to the plasma within
the vacuum chamber. A power control module is adapted to produce a second
signal in response to the first signal from the power monitor, and a power
controller is adapted to adjust, in response to the second signal, the low
frequency power applied to the plasma to maintain a substantially stable
average low frequency power applied to the plasma while the article is
being processed.
