Providing liquid treatment equipment capable of largely reducing a
frequency of discarding a treatment solution as a whole and capable of
implementing smooth and high quality liquid treatment with less
manufacturing burden. Equipment comprises a treatment solution bath
capable of accommodating a treatment solution for implementing liquid
treatment to a substrate to treat, a treatment solution circulating system
circulating the accommodated treatment solution between the outside of the
treatment solution bath, and a product removal unit removing a reaction
product due to the liquid treatment contained in the circulated treatment
solution. By circulating the accommodated treatment solution between the
outside of the treatment solution bath, reaction products contained in the
circulated treatment solution are removed by means of the product removal
unit. Thereby, a chemical change substance and a decomposition product
remaining in a treatment solution can be removed, resulting in preventing
a treatment solution from deteriorating.
