The invention relates to an inductor comprising a plurality of
interconnected conductive segments interwoven with a substrate. The
inductance of the inductor is increased through the use of coatings and
films of ferromagnetic materials such as magnetic metals, alloys, and
oxides. The inductor is compatible with integrated circuit manufacturing
techniques and eliminates the need in many systems and circuits for large
off chip inductors. A sense and measurement coil, which is fabricated on
the same substrate as the inductor, provides the capability to measure the
magnetic field or flux produced by the inductor. This on chip measurement
capability supplies information that permits circuit engineers to design
and fabricate on chip inductors to very tight tolerances.
