A projection optical system includes at least one lens, at least one
concave mirror, at least one diffractive optical element, a first imaging
optical system that includes the at least one lens and the at least one
concave mirror, for imaging an intermediate image of an object, a second
imaging optical system, having the at least one lens and the at least one
diffractive optical element, for projecting the intermediate image onto an
image plane, and a field optical system disposed between the first and
second imaging optical systems.
