A micropump comprising a pump body including a fluid inlet channel, a fluid
outlet channel and pumping reservoir, the fluid inlet channel and the
fluid outlet channel communicating with the pumping reservoir, a diaphragm
covering the pumping reservoir, a piezoelectric strip actuator attached to
the diaphragm such that by applying a voltage to the actuator, the
diaphragm can be raised or lowered relative to the pumping chamber, a
valve on the inlet channel and the outlet channel, the valve opening and
closing the inlet and the outlet channel in response to the raising and
lowering of the diaphragm.
