Semiconductor device and process for its manufacture to increase threshold voltage stability

   
   

The oxide atop a P pad below the gate electrode has a cut completely through the oxide atop the P pad to prevent the drift of contamination ions, such as sodium ions from the periphery of a MOSgated device to the periphery of the active area, thus stabilizing the device threshold voltage under high temperature reverse bias. The cut may be filled with metal.

 
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