A pair of opposing thin plate sections, movable sections, and fixed
sections for supporting the thin plate sections and the movable sections
are provided on a ceramic substrate. After a wiring pattern and a gap or
an insulating layer of cermet layer for filling the gap are formed on a
ceramic substrate, these are sintered. After that,
piezoelectric/electrostrictive layers and cermet electrode layers
including a piezoelectric/electrostrictive material and a conductive
material are alternately stacked in a comb like structure on the ceramic
substrate. Accordingly, a piezoelectric/electrostrictive device having the
piezoelectric/electrostrictive element in multilayer structure is
obtained.
