Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method

   
   

A temperature adjustment apparatus for adjusting a temperature of an object to be temperature-controlled. The apparatus includes a first temperature adjustment mechanism for controlling the temperature of the object to be temperature-controlled, and a second temperature adjustment mechanism for controlling the temperature of the object to be temperature-controlled. The first and second temperature adjustment mechanisms have different temperature control responses, and control the temperature of the object to be temperature-controlled in cooperation with coarse adjustment and fine adjustment on the basis of a difference in response. Also, the first temperature adjustment mechanism and the second temperature adjustment mechanism are operatively connected so that the output of the first temperature adjustment mechanism controls the operation of the second temperature adjustment mechanism.

Um instrumento do ajuste da temperatura para ajustar uma temperatura de um objeto para ser temperature-controlled. O instrumento inclui um primeiro mecanismo do ajuste da temperatura para controlar a temperatura do objeto para ser temperature-controlled, e um segundo mecanismo do ajuste da temperatura para controlar a temperatura do objeto para ser temperature-controlled. Os primeiros e segundos mecanismos do ajuste da temperatura têm respostas diferentes do controle de temperatura, e controlam a temperatura do objeto para ser temperature-controlled na cooperação com o ajuste grosseiro e o ajuste fino na base de uma diferença na resposta. Também, o primeiro mecanismo do ajuste da temperatura e o segundo mecanismo do ajuste da temperatura são conectados operativa de modo que a saída do primeiro mecanismo do ajuste da temperatura controle a operação do segundo mecanismo do ajuste da temperatura.

 
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