Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same

   
   

Provided are a fluorine-containing photosensitive polymer having a hydrate structure and a resist composition including the photosensitive polymer. The photosensitive polymer has an average molecular weight of about 3,000-100,000 with a repeating unit including a group having one of structural formulae below: ##STR1##

Si sont un polymère photosensible fluoré ayant une structure d'hydrate et une composition en résistance comprenant le polymère photosensible. Le polymère photosensible a un poids moléculaire moyen environ de 3.000-100.000 avec une unité de répétition comprenant un groupe ayant une de formules structurales ci-dessous : ## du ## STR1

 
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