Process and device for depositing, by electron cyclotron resonance plasma,
a web of carbon nanofibres or nanotubes, on a substrate without a
catalyst, by injection of a microwave power into a deposition chamber
including a magnetic structure with a highly unbalanced magnetic mirror
and at least one electron cyclotron resonance zone within the interior of
the deposition chamber itself and opposite the substrate. Under a pressure
of less than 10.sup.-4 mbar, ionization and/or dissociation of a gas
containing carbon is induced in the magnetic mirror in the center of the
deposition chamber, thus producing species that deposit on the substrate,
which is heated. A resulting film, which may be on a substrate, can be
formed from a web or a network of interconnected carbon nanofibres or
nanotubes, like a spider's web, the film being exempt of a catalyst and a
structure of several layers-a multi-layer structure-including at least two
layers of a web of carbon nanofibres or nanotubes, as well as filters,
electron accelerating or decelerating nanogrids and flat screens including
such films or structures.
