An electrokinetic pump in which the porous dielectric medium of
conventional electrokinetic pumps is replaced by a patterned
microstructure. The patterned microstructure is fabricated by lithographic
patterning and etching of a substrate and is formed by features arranged
so as to create an array of microchannels. The microchannels have
dimensions on the order of the pore spacing in a conventional porous
dielectric medium. Embedded unitary electrodes are vapor deposited on
either end of the channel structure to provide the electric field
necessary for electroosmotic flow.
