A technique for measuring the current, voltage and phase of a radio
frequency (RF) power wave to an RF load, accounts for the finite length of
the voltage and current pickups, and corrects for effects of standing wave
components of voltage and current. Voltage and current are computed as
complex functions of the voltage pickup signal and the current pickup
signal, based on coefficients precalibrated for radio frequency.
Alternatively, a corrected current value can be based on the corrected
voltage value and complex load impedance. The correction coefficients can
be obtained, for each of a plurality of calibrating radio frequencies
within an RF range, from voltage and current pickup signals under
conditions of (a) open circuit load, (b) short circuit load, (c) fixed
known impedance load; and (d) one of voltage and current being applied at
a precise input level to a know load from an RF calibration source.
