The present invention provides a chemically amplified resist composition comprising: (A) a salt represented by the formula (1) ##STR00001## wherein R.sup.21, Q.sup.1, Q.sup.2, and A.sup.+ defined in the specification; (B) a salt represented by the formula (II): ##STR00002## wherein R.sup.22, Q.sup.3, Q.sup.4, and A.sup.'+ are defined in the specification; and (C) a resin which contains a structural unit having a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid.