A method for laser shock peening an article, such as a gas turbine engine airfoil, with varying thickness by varying a surface fluence of a laser beam over a laser shock peening surface as a function of the thickness beneath a laser shock peened spot formed by the beam on the surface. The fluence may be equal to the thickness multiplied by a volumetric fluence factor, the volumetric fluence factor being held constant over the laser shock peening surface. The volumetric fluence factor may be in a range of about 1200 J/cm.sup.3 to 1800 J/cm.sup.3 and more particularly about 1500 J/cm.sup.3. The method may include varying energy in the laser beam using a computer program controlling firing of the laser beam. A device such as an optical attenuator external to a laser performing firing may be used to vary the energy.