The component placement substrate of the present invention can be produced easily with suppressed cracks in a thin film formed on a pattern film of the substrate. The present invention provides a component placement substrate provided with one or more pattern films on a substrate, wherein at least one of the pattern film(s) has a cross-sectional shape composed of a semi-elliptical circular upper part, and one of a forward taper shaped lower part and a approximately vertical taper shaped lower part and the average thickness of the lower part is 50 .ANG. or larger and 3,000 .ANG. or smaller.