A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable reflective element. The movable reflective element includes a flexible dielectric layer and a second reflective layer mechanically coupled to the flexible dielectric layer. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer.

 
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< Laser beam conditioning system comprising multiple optical paths allowing for dose control

< MEMS devices requiring no mechanical support

> MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same

> Automatic monitoring of analog gauges

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