Disclosed is a metal waveguide device, and nano plasmonic integrated circuits and an optical integrated circuit module using the same. The nano plasmonic integrated circuit module includes an input coupling unit, an input focusing unit, a surface plasmon polariton waveguide for guiding surface plasmon polaritons, a signal sensing/processing unit, an output defocusing unit, and an output coupling unit for converting surface plasmon polariton signals into optical signals. The optical integrated circuit module includes the nano plasmonic integrated circuit module, thus realizing highly integrated photonic circuits having a micro structure, low power consumption and low price.