A barrier film for packaging food or beverage comprises a polymer base film, and a barrier layer comprising an inorganic oxide applied onto the base film by vapour deposition. The inorganic oxide layer is further coated with a healing layer of a crosslinked organopolysiloxane which is covalently bound to the inorganic layer. Other aspects disclosed here involve a multilayer packaging laminate comprised of the barrier film, and a method of manufacturing the barrier film and packaging containers manufactured from the film.