In some embodiments of the invention, a probing apparatus can comprise a substrate, a spring structure attached to the substrate, and a plurality of resilient probes attached to the spring structure. Each probe can comprise a contact portion disposed to contact a device. The spring structure can provide a first source of compliance for each of the probes in response to forces on the contact portions of the probes, and each of the probes can individually provide second sources of compliance in response to the forces on the contact portions of the probes.