A probe includes an arm region extending in the back and forth direction,
and a tip region extending downward from the front end portion of the arm
region. The tip region has a pedestal portion integrally continuous to a
lower edge portion at the front end side of the arm region and having an
underside inclined to an imaginary axis extending in the vertical
direction; and a contact portion projected from the underside of the
pedestal portion and having a tip orthogonal to an imaginary axis. Thus,
the position of the tip can be accurately determined.